Sputtering
Sputtering
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Energy glossary
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Sputtering
Meaning of term sputtering
A process used to apply photovoltaic semi-conductor material to a substrate by a physical vapor deposition process where high-energy ions are used to bombard elemental sources of semiconductor material, which eject vapors of atoms that are then deposited
Source: http://www.desc.dla.mil/dcm/files/all%20inclusive%20energy%20glossary.xls
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